\u7535\u6c60<\/a>\u57fa\u677f\u4ee5\u7845\u57fa\u677f\u4e3a\u4e3b\uff1b\u5728\u7845\u57fa\u677f\u4e0a\u6c89\u79ef\u9ad8\u80fd\u9699\uff08Energy band gap\uff09<\/p>\n\n\n\n\u7684\u7845\u5948\u7c73\u8584\u819c\uff0c\u8868\u5c42\u518d\u6c89\u79ef\u900f\u660e\u5bfc\u7535\u819c\uff0c\u80cc\u8868\u9762\u6709\u7740\u80cc\u8868\u9762\u7535\u573a\u3002<\/p>\n\n\n\n
\u901a\u8fc7\u4f18\u5316\u7845\u7684\u8868\u9762\u7ec7\u6784\uff0c\u53ef\u4ee5\u964d\u4f4e\u900f\u660e\u5bfc\u7535\u6c27\u5316\u5c42\uff08TCO\uff09\u548ca-Si\u5c42\u7684\u5149\u5b66\u5438\u6536\u635f\u8017\u3002HIT\u7535\u6c60\u6291\u5236\u4e86p\u578b\u3001i\u578ba-Si\u7684\u5149\u5438\u6536\u7387\uff0c\u800c\u589e\u5f3an\u578bc-Si\u7684\u5149\u5438\u6536\u7387\u3002<\/p>\n\n\n\n
HIT \u7535\u6c60\u5728\u6280\u672f\u4e0a\u7684\u4f18\u52bf<\/p>\n\n\n\n
\u7531\u4e8eHIT\u592a\u9633\u80fd\u7535\u6c60\u4f7f\u7528a-Si\u6784\u6210pn\u7ed3\uff0c\u6240\u4ee5\u80fd\u591f\u5728200\u2103\u4ee5\u4e0b\u7684\u4f4e\u6e29\u5b8c\u6210\u6574\u4e2a\u5de5\u5e8f\u3002\u548c\u539f\u6765\u7684\u70ed\u6269\u6563\u578b\u7684\u7ed3\u6676\u592a\u9633\u7535\u6c60\u7684\u5f62\u6210\u6e29\u5ea6\uff08~900\u2103\uff09\u76f8\u6bd4\u8f83\uff0c\u5927\u5e45\u5ea6\u5730\u964d\u4f4e\u4e86\u5236\u9020\u5de5\u827a\u7684\u6e29\u5ea6\u3002\u7531\u4e8e\u8fd9\u79cd\u5bf9\u79f0\u6784\u9020\u548c\u4f4e\u6e29\u5de5\u827a\u7684\u7279\u5f81\uff0c\u51cf\u5c11\u4e86\u56e0\u70ed\u91cf\u6216\u8005\u819c\u5f62\u6210\u65f6\u4ea7\u751f\u7684Si\u6676\u7247\u7684\u53d8\u5f62\u548c\u70ed\u635f\u4f24\uff0c\u5bf9\u5b9e\u73b0\u6676\u7247\u7684\u8f7b\u8584\u5316\u548c\u9ad8\u6548\u5316\u6765\u8bf4\u662f\u6709\u5229\u7684\uff0c\u5177\u6709\u4e1a\u754c\u9886\u5148\u7684\u9ad8\u8f6c\u6362\u6548\u7387\uff08\u7814\u7a76\u5ba4\u6c34\u5e73\u4e3a23%\uff0c\u91cf\u4ea7\u6c34\u5e73\u4e3a20%\uff09\uff0c\u5373\u4f7f\u5728\u9ad8\u6e29\u4e0b\uff0c\u8f6c\u6362\u6548\u7387\u4e5f\u6781\u5c11\u964d\u4f4e\uff0c\u5229\u7528\u53cc\u9762\u5355\u5143\u6765\u63d0\u9ad8\u53d1\u7535\u91cf\u3002<\/p>\n\n\n\n
HIT \u7535\u6c60\u7684\u5236\u9020\u5de5\u827a<\/p>\n\n\n\n
HIT\u7535\u6c60\u7684\u5173\u952e\u6280\u672f\u662fa-Si:H\u8584\u819c\u7684\u6c89\u79ef\uff0c\u8981\u6c42\u8bf4\u6c89\u79ef\u7684\u672c\u5f81a-Si:H\u8584\u819c\u7684\u7f3a\u9677\u6001\u5bc6\u5ea6\u4f4e\uff0c\u63ba\u6742a-Si:H\u7684\u63ba\u6742\u6548\u7387\u9ad8\u4e14\u5149\u5438\u6536\u7cfb\u6570\u4f4e\uff0c\u6700\u91cd\u8981\u7684\u662f\u6700\u7ec8\u5f62\u6210\u7684a-Si:H\/Si\u754c\u9762\u7684\u6001\u5bc6\u5ea6\u8981\u4f4e\u3002\u76ee\u524d\uff0c\u666e\u904d\u91c7\u7528\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\uff08PECVD\uff09\u6c89\u79ef\u672c\u5f81\u53ca\u63ba\u6742\u7684a-Si:H\u819c\uff0c\u540c\u65f6\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u53d1\uff08HWCVD\uff09\u5236\u5907a-Si:H\u6cd5\u4e5f\u88ab\u8ba4\u4e3a\u5f88\u6709\u524d\u666f\u3002<\/p>\n\n\n\n
PECVD\u6cd5\u5236\u5907a-Si:H\u8584\u819c<\/p>\n\n\n\n
\u5229\u7528\u7b49\u79bb\u5b50\u91cc\u4e2d\u4e30\u5bcc\u7684\u6d3b\u6027\u7c92\u5b50\u6765\u8fdb\u884c\u4f4e\u6e29\u6c89\u79ef\u4e00\u76f4\u662fa-Si:H\u5236\u5907\u7684\u91cd\u8981\u65b9\u6cd5\u3002\u5728\u771f\u7a7a\u72b6\u6001\u4e0b\u7ed9\u6c14\u4f53\u65bd\u52a0\u7535\u573a\uff0c\u6c14\u4f53\u5728\u7535\u573a\u63d0\u4f9b\u7684\u80fd\u91cf\u4e0b\u4f1a\u6709\u6c14\u6001\u8f6c\u53d8\u4e3a\u7b49\u79bb\u5b50\u4f53\u72b6\u6001\u3002\u5176\u4e2d\u542b\u6709\u5927\u91cf\u7684\u7535\u5b50\u3001\u79bb\u5b50\u3001\u5149\u5b50\u548c\u5404\u7c7b\u81ea\u7531\u57fa\u7b49\u6d3b\u6027\u7c92\u5b50\u3002\u7b49\u79bb\u5b50\u4f53\u662f\u90e8\u4efd\u79bb\u5b50\u5316\u7684\u6c14\u4f53\uff0c\u4e0e\u666e\u901a\u6c14\u4f53\u76f8\u6bd4\uff0c\u4e3b\u8981\u6027\u8d28\u53d1\u751f\u4e86\u672c\u8d28\u7684\u53d8\u5316\uff0c\u662f\u4e00\u79cd\u65b0\u7269\u8d28\u805a\u96c6\u6001\u3002\u7b49\u79bb\u5b50\u4f53\u4e2d\u653e\u7f6e\u5176\u4e2d\u7684\u886c\u5e95\u53ef\u4ee5\u4fdd\u6301\u5728\u5ba4\u6e29\uff0c\u800c\u7535\u5b50\u5728\u7535\u5382\u7684\u6fc0\u53d1\u4e0b\u4f1a\u5f97\u5230\u8db3\u591f\u591a\u7684\u80fd\u91cf\uff082-5eV\uff09\uff0c\u901a\u8fc7\u4e0e\u5206\u5b50\u7684\u78b0\u649e\u5c06\u5176\u7535\u79bb\uff0c\u6fc0\u53d1\u3002PECVD\u7684\u7f3a\u70b9\u8868\u73b0\u5728\u4e24\u4e2a\u65b9\u9762\uff0c\u4e00\u662f\u5b83\u7684\u4e0d\u7a33\u5b9a\u6027\uff0c\u4e8c\u662f\u7535\u5b50\u548c\u79bb\u5b50\u7684\u8f90\u5c04\u4f1a\u5bf9\u6240\u6c89\u79ef\u7684\u8584\u819c\u6784\u6210\u5316\u5b66\u7ed3\u6784\u4e0a\u7684\u635f\u4f24\u3002\u7b49\u79bb\u5b50\u4f53\u4f5c\u4e3a\u51c6\u4e2d\u6027\u6c14\u4f53\uff0c\u5b83\u7684\u72b6\u6001\u5bb9\u6613\u88ab\u5916\u90e8\u6761\u4ef6\u7684\u6539\u53d8\u800c\u53d1\u751f\u53d8\u5316\u3002\u886c\u5e95\u8868\u9762\u7684\u5e26\u7535\u72b6\u6001\uff0c\u53cd\u5e94\u5668\u58c1\u7684\u8584\u819c\u9644\u7740\uff0c\u7535\u6e90\u7684\u6ce2\u52a8\uff0c\u6c14\u4f53\u7684\u6d41\u901f\u90fd\u4f1a\u6539\u53d8\u6d3b\u6027\u7c92\u5b50\u7684\u79cd\u7c7b\u548c\u6570\u91cf\uff0c\u5e76\u4e14\u7b49\u79bb\u5b50\u4f53\u7684\u5747\u5300\u6027\u4e5f\u96be\u4ee5\u63a7\u5236\uff0c\u8fd9\u6837\u90fd\u4f1a\u6539\u53d8\u886c\u5e95\u7684\u72b6\u6001\u3002\u7b49\u79bb\u5b50\u4f53\u4e2d\u7684\u79bb\u5b50\u8f70\u51fb\u548c\u5149\u5b50\u8f90\u7167\uff0c\u9664\u4e86\u4f1a\u5f71\u54cd\u6c89\u79ef\u819c\u7684\u8d28\u91cf\uff0c\u8fd8\u4f1a\u5f71\u54cd\u4e0b\u9762\u7684\u7845\u886c\u5e95\u3002\u5149\u8c31\u76f8\u5e94\u7684\u7814\u7a76\u7ed3\u679c\u8868\u660e\u5bf9\u4e8e\u84dd\u5149\u533a\uff0cHIT\u7535\u6c60\u7684\u5149\u8c31\u76f8\u5e94\u63d0\u9ad8\uff0c\u800c\u5728\u7ea2\u5149\u533a\uff0c\u5149\u8c31\u76f8\u5e94\u53d8\u4f4e\u3002\u8fd9\u8bf4\u660e\u5bf9\u4e8e\u672c\u5f81\u5c42\u7684\u949d\u5316\u6548\u679c\u63d0\u9ad8\u4e86\u84dd\u5149\u5149\u8c31\u54cd\u5e94\u7684\u7ed3\u679c\uff0c\u800c\u5bf9\u4e8e\u7845\u7247\u5185\u90e8\u7684\u635f\u4f24\uff0c\u5219\u5bf9\u7ea2\u5149\u90e8\u5206\uff0c\u5149\u8c31\u76f8\u5e94\u964d\u4f4e\uff0c\u91cf\u5b50\u6548\u7387\u4e0b\u964d\u3002\u5bf9\u4e8e\u8fd9\u79cd\u60c5\u51b5\uff0c\u53ef\u4ee5\u4e0b\u8c03\u7b49\u79bb\u5b50\u4f53\u7684\u529f\u7387\uff0c\u4f46\u662f\u540c\u65f6\u4e5f\u4f1a\u964d\u4f4e\u7b49\u79bb\u5b50\u4f53\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n\n\n\n
HWCVD\u5236\u5907a-Si:H\u8584\u819c<\/p>\n\n\n\n
\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79efHWCVD\u662f\u5229\u7528\u70ed\u4e1d\u5bf9\u6c14\u4f53\u8fdb\u884c\u50ac\u5316\u548c\u5206\u89e3\u7684\u8f6f\u6027\u8fc7\u7a0b\uff0c\u4e0d\u4f1a\u4ea7\u751f\u9ad8\u80fd\u7c92\u5b50\u8f70\u51fb\uff0c\u5bf9\u886c\u5e95\u7684\u635f\u4f24\u8f83\u5c0f\uff0c\u53ef\u4ee5\u5bb9\u6613\u7684\u79fb\u5165\u6216\u8005\u79fb\u51fa\u6c89\u79ef\u5ba4\uff0c\u80fd\u591f\u65b9\u4fbf\u4ece\u5b9e\u9a8c\u5ba4\u8f6c\u6362\u5230\u751f\u4ea7\u7ebf\u4e0a\u3002<\/p>\n\n\n\n
\u5728HIT\u7535\u6c60\u4e2d\uff0c\u975e\u6676\u7845\u53d1\u5c04\u6781\u548c\u6676\u4f53\u7845\u4e4b\u95f4\u5939\u77405\u7eb3\u7c73\u540e\uff0c\u7f3a\u9677\u5bc6\u5ea6\u4f4e\u4e8e\u975e\u6676\u7845\u7684\u672c\u5f81\u975e\u6676\u7845\u8584\u819c\u3002HWCVD\u7684\u7f3a\u70b9\u5728\u4e8e\u975e\u6676\u7845\u7684\u5916\u5ef6\u53ef\u4ee5\u7a7f\u900f5\u7eb3\u7c73\u540e\u7684\u672c\u5f81\u8584\u819c\u800c\u4e0e\u6676\u4f53\u7845\u76f4\u63a5\u63a5\u89e6\uff0c\u8fd9\u6837\u4f1a\u5bfc\u81f4\u9ad8\u7f3a\u9677\uff0c\u8fd9\u6837\u754c\u9762\u9762\u79ef\u548c\u7f3a\u9677\u6001\u5bc6\u5ea6\u7684\u589e\u5927\u4f1a\u5bfc\u81f4\u9ad8\u7684\u6697\u7535\u6d41\uff0c\u7ee7\u800c\u5f00\u8def\u7535\u538b\u4e5f\u4f1a\u51cf\u4f4e\u3002\u5728\u5236\u5907\u4e2d\u5c06\u6e29\u5ea6\u63a7\u5236\u5728200\u5ea6\u4ee5\u4e0b\u80fd\u591f\u6291\u5236\u975e\u6676\u7845\u7684\u5916\u5ef6\u3002<\/p>\n\n\n\n
HIT\u7535\u6c60\u5de5\u827a\u7684\u6539\u826f\u65b9\u5411<\/p>\n\n\n\n
\u63d0\u9ad8\u754c\u9762\u949d\u5316\u6548\u679c<\/p>\n\n\n\n
\u5f53\u975e\u6676\u7845\u548c\u6676\u4f53\u7845\u7684\u754c\u9762\u9677\u9631\u5bc6\u5ea6\u75311011\u6bcf\u5e73\u65b9\u5398\u7c73\u4e0a\u5347\u523010~12\u6bcf\u5e73\u65b9\u5398\u7c73\u65f6\uff0c\u7535\u6c60\u6548\u7387\u4f1a\u964d\u4f4e20%\u3002\u672c\u5f81\u975e\u6676\u7845\u7684\u949d\u5316\u6548\u679c\u7531\u4e8ea-Si:H\u8584\u819c\u7684\u5b58\u5728\u800c\u53d8\u5dee\uff0c\u8fd9\u53ef\u80fd\u662f\u886c\u5e95\u4e2d\u7684\u5c11\u5b50\u6ce2\u51fd\u6570\u7a7f\u8fc7\u672c\u5f81\u975e\u6676\u7845\u800c\u548ca-Si:H\u8584\u819c\u4e2d\u7684\u7f3a\u9677\u6001\u76f8\u4e92\u4f5c\u7528\uff0c\u8fd9\u6837\u6784\u6210\u4e86\u8f7d\u6d41\u5b50\u7684\u590d\u5408\u901a\u9053\u3002\u53ef\u4ee5\u4f7f\u7528\u591a\u5f62\u7845\u6765\u4f5c\u4e3a\u949d\u5316\u5c42\uff0c\u56e0\u4e3a\u5b83\u5177\u6709\u66f4\u4f4e\u7684\u7f3a\u9677\u6001\u5bc6\u5ea6\u548c\u6697\u7535\u6d41\u3002<\/p>\n\n\n\n
\u5149\u9677\u7ed3\u6784\u548c\u8868\u9762\u6e05\u6d17<\/p>\n\n\n\n
\u5c06\u5236\u7ed2\u540e\u7684\u7ec7\u6784\u8868\u9762\u5c42\u4f7f\u7528\u786b\u9178\u548c\u53cc\u6c27\u6c34\u8fdb\u884c\u6c27\u5316\uff0c\u7136\u540e\u4f7f\u7528\u4f7f\u7528\u6d53\u5ea6\u4e3a1%\u7684\u6c22\u6c1f\u9178\u8fdb\u884c60\u5230180\u79d2\u7684\u8150\u8680\uff0c\u8fd9\u6837\u53ef\u4ee5\u53bb\u9664\u7f3a\u9677\u5c42\u6765\u4f7f\u7c97\u7cd9\u5ea6\u964d\u4f4e\uff0c\u63a5\u8fd1\u629b\u5149\u7845\u7684\u6548\u679c\u3002<\/p>\n\n\n\n
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